Sensors for Cleanroom Monitoring
Sustainable Monitoring with E+E Elektronik Sensors
In the pharmaceutical and semiconductor industries, it is crucial to rely on measurement technologies that are both long-term stable and highly precise. Monitoring sensitive production processes in cleanrooms sets high standards, particularly regarding the continuous monitoring of the working environment in accordance with established norms and guidelines, such as ISO or GMP.
Reliable, Precise, and Fail-safe – Cleanroom Monitoring at the Highest Level!
1. Laminar Flow
Ensuring clean and validated operation through laminar flow control.
In nearly all cleanrooms, Filter Fan Units (FFUs) are used to ensure a clean environment through a directed airflow with very low air movement. E+E Elektronik air flow sensors are excellent for controlling laminar flow, guaranteeing safe and validated operation.
High Measurement Accuracy for Minimal Flows
A clean working environment is crucial for stable processes and high-quality components. Monitoring airflow plays a central role in the validation and continuous monitoring of production facilities in cleanrooms. The EE680 air flow sensor from E+E Elektronik is optimised for monitoring laminar flows in cleanroom environments. Its GMP-compliant design is ideal for cleanrooms and safety cabinets in pharmaceutical, life sciences, and microelectronics industries. With a measurement range of 0 to 2 m/s and an accuracy of 0.05 m/s, it is particularly suitable for sensitive systems such as RABS (Restricted Access Barrier Systems) and isolators. Additionally, laminar flow sensors can be tested in-house in the ISO 17025 accredited laboratory to ensure traceable measurement accuracy.
- Sensor Solution:
EE680 Air Velocity Sensor for Laminar Flow Monitoring
Advantages of Laminar Flow Monitoring
- Ensuring production safety
- Maintaining cleanroom conditions through continuous air exchange
- Preventing particle accumulation in gloveboxes
- Removing harmful particles effectively
2. Climate Control
Preparing cleanroom air to maintain standard climate conditions.
Climate plays a vital role in clean or grey rooms. Humidity and temperature are particularly important for smooth processes, as they influence material properties, static charges, microbial growth, and more. Targeted climate control also significantly enhances the overall system’s efficiency.
Advantages of Targeted Climate Control
- Compliance with ISO 14644 cleanroom standards
- High energy-saving potential through optimised climate control
- Ensuring high product and production safety
3. Differential Pressure
Preventing contamination through personnel and material airlocks.
To prevent potentially contaminated air from entering the cleanroom, it must maintain a higher pressure than adjacent areas, such as airlocks or grey rooms. Many cleanrooms are therefore equipped with real-time monitoring systems for continuous differential pressure monitoring.
- Sensor Solution:
EE610 Low Differential Pressure Sensor
Highly Accurate Measurement of Low Differential Pressure
Differential pressure measurement is a key aspect of ensuring optimal cleanroom conditions. It monitors the pressure differences between individual cleanroom zones and ensures the correct airflow direction to prevent contamination. In addition to the individual cleanroom classes, the correct pressure must also be maintained in buffer zones between the cleanroom and uncontrolled areas, such as airlocks or transfer chambers. This prevents contamination of the cleanroom during the introduction of materials or when personnel enter. To comply with all relevant cleanroom standards, highly precise differential pressure measurement between the rooms is essential. Furthermore, continuous differential pressure monitoring helps prevent dangerous pressure fluctuations in the cleanroom caused by faulty ventilation systems. With the EE610, E+E Elektronik offers the ideal differential pressure sensor for cleanroom applications. The EE610 provides an accuracy of ±0.5 Pa across the entire measurement range. Its long-term stable piezoresistive sensor element operates without gas flow, thereby preventing cross-contamination.
Talk to our E+E sensor specialists
Find out how E+E Elektronik sensors can optimise energy use and maintain quality standards. Connect with our team to explore custom solutions to make your production more efficient.
